Effect of Filtering Duct Coil Current on the Bonding Structure of Tetrahedral Amorphous Carbon Film

Han Liang, Cui Bin, Yang Wei

Abstract


Tetrahedral amorphous carbon (ta-C) films were deposited at 200V and 500V pulse substrate bias by adjusting the filtering duct coil current ranging from 5A to 13A in filtered cathodic vacuum arc (FCVA) system. The bonding structure of ta-C films is measured by visible Raman spectroscopy. The ratio of average ion current density to deposition rate decrease with the filtering duct coil current. Meanwhile the deposition rate increases with the increment of the filtering duct coil current. The intensity ratio ID/IG of the films increases with the increment of the filtering duct coil current, which indicates the graphitization of the films concurrently increase with the filtering duct coil current.


DOI
10.12783/dtetr/apetc2017/11447

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