CrN Films Deposited by Magnetic Field-enhanced Arc Ion Plating

Yanhui Zhao, Zhanqi Liu, Chaoqian Guo, Guoqiang Lin, Baohai Yu

Abstract


CrN films were deposited on high-speed-steel (HSS) substrates by arc ion plating. The influence of an axial magnetic field was examined with regard to the microstructure, chemical elemental composition and mechanical properties of the films. The film chemical composition, microstructure, surface morphology, surface roughness and hardness were investigated by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscope (SEM), Surface morphology analyzer and Viker microhardness test. The results showed that the N/Cr ratio increases when the magnetic field intensity increases from 0 to 30 mT. With increasing the magnetic field intensity, the film structures change in such way: Cr2N+CrCr2N+CrNCrN. The film micro hardness increases with the magnetic field intensity.


DOI
10.12783/dtetr/apetc2017/11422

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