Design and Analysis of Pneumatic Driven Compliant Automatic Slide Device

Yaowu Shen, Jindong Yu, Xuchong Zhang, Xianmin Zhang


Based on the deformation principle of flexible hinge, a kind of pneumatic driven flexible automatic slide deviceis designed. First, a theoretical analysis model of the stiffness and strength is established for the stage. Second, the optimal structure parameters are obtained by the optimization method. Further, the design results are validated by the simulation of Finite Element Analysis software. Finally, prototype of stage is manufactured. Calibration of stage is performed, and error of positioning is analyzed based on the experimental results.


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