Stopper Parameters Design for Micro-elastic Beam Under High Shock Environment

Tao Jiang, Ning Ma


Aimed at to the proper design of the stopper parameters about micro-elastic beam of MEMS gyroscope under high-g shock, Micro-elastic beam and stopper collision system are built to analyze that how elastic coefficient and limit distance of stopper to affect the shock response of a micro-elastic beam, then determining the optimal range of elastic coefficient and limit distance and their correctness will be proved through FEA software. Results show that: On the premise of meeting the limit requirements, to minimize the value of limit distance is advantageous to improve the impact resistance of the micro-elastic beam, and proper elastic coefficient can restrain second force; stopper parameters design in this paper have some reference value for MEMS gyroscope design under high-g shock.


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